Which process plays a crucial role in transforming the pattern or layout on the working mask of silicon wafer in an IC fabrication mechanism? (Marks : 01)

a. Wafer Cleaning

b. Mask Making
c. Epitaxy
d. Photo-lithography

ANSWER: Photo-lithography

Explanation:

Photo-lithography basically deals with the photo-engraving technique where the silicon wafer is coated with a photo-resist along with an exposure to UV light.

However, the exposed portions of resist are completely removed by keeping the unexposed areas at an intact or an integral level